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硅片抛光液工艺应用参数
型号 | ecosil®WP100 | ecosil®WP200 | ecosil®WP300 | ecosil®WP500 |
固含量(%) | 15 ~18 | 14~16 | 19~22 | 19~22 |
颗粒尺寸(nm) | 70.0 ± 10.0 | 20.0 ± 5.0 | 80.0 ± 10.0 | 100.0 ± 20.0 |
粘度(20℃) | < 5 | < 5 | < 5 | < 5 |
比重(20℃) | 1.10 ± 0.02 | 1.08 ± 0.02 | 1.12 ± 0.02 | 1.12 ± 0.02 |
pH ( 20℃) | 11.3 ± 5.0 | 11.3 ± 5.0 | 11.3 ± 5.0 | 11.3 ± 5.0 |